微纳制造

出版时间：2007-1  出版社：科学出版社  作者：杰克逊  页数：699  字数：1150000  

内容概要

纳米技术是当前科学研究与工业开发的热门领域之一。本书全面阐述了微纳器件的设计和制造方面的知识，以及在设计和制造时所要考虑的诸多因素。书中涵盖了多种制造技术，包括微纳制造技术、体和表面微加工技术、LiGA技术、薄膜沉积技术、纳加工技术等。     本书内容丰富，讲解透彻，是一本相关领域电子工程师、材料科研工作者开发微纳米材料应用的全面的指南，同时也可作为微纳米机械和微纳米技术专业研究生的参考书。

书籍目录

Preface1. Principles of Micro-and Nanofabrication  1.1 Introduction  1.2 Material Removal Rates  1.3 Conclusions  1.4 Problems  References2. Microfabrication Using X-ray Lithography  2.1 Introduction  2.2 X- ray Lithography  2.3 Synchrotron Radiation  2.4 Microfabrication Process  2.5 Methods of Resist Application  2.6 Exposure  2.7 Problems  References3. Manufacturing High Aspect Ratio Microstructures  3.1 I ntrod uction  3.2 Dry Etching  3.3 Plasma Etching Processes  3.4 Characteristics of the Plasma  3.5 Etching of Microstructures  3.6 Micromachining High Aspect RatioMicrostructures  3.7 Micromolding  3.8 Micromolding Processes  3.9 Micromolding Tools  3.10 Micromold Design  3.11 MicromoldingApplications  3.12 Limitations of Micromolding  3.13 Fabrication of Moving Microstructures  3.14 Conclusions  3.15 Problems  References4. Meso-micromachining  4.1 Introduction  4.2 Size Effects in Micromachining  4.3 Mechanism for Large Plastic Flow  4.4 Inhomogeneous Microstrains  4.5 Origins of the Size Effect  4.6 Meso-machining Processes  4.7 Problems  References5. Mechanical Micromachining  5.1 Introduction  5.2 Microfluidic Systems  5.3 Theory of Micromachining  5.4 Experimental Micromachining  5.5 Micromachining Tool Design  5.6 High-Speed Air Turbine Spindles  5.7 Mechanical Design of Rotors  5.8 Discussion  5.9 Conclusions  5.10 Future Developments  5.11 Problems  References6. Microgrinding  6.1 Introduction  6.2 Grinding Wheels  6.3 Conventional Grinding Processes  6.4 Precision Grinding Processes  6.5 Ultra Precision Grinding  6.6 Conclusions  6.7 Problems  References7. Diamond Micro Cutting Tools  7.1 Introduction  7.2 Properties of Diamond  7.3 History of Diamond  7.4 CVD Diamond Technology  7.5 CVD Diamond Processes  7.6 Treatment of Substrate  7.7 Modification of HFCVD Process  7.8 Nucleation and Growth  7.9 Deposition on 3-D Substrates  7.10 Wear of Diamond  7.11 Time-Modulated CVD Diamond  7.12 Conclusions  7.13 Problems  References8. Laser Micro- and NanofabricaUon  6.1 Introduction  8.2 Laser Fundamentals  8.3 Laser Microfabrication  8.4 Laser Nanofabrication  8.5 Conclusions  8.6 Problems  References9. Micromachining Using Water Droplets  9.1 Introduction  9.2 Theory of Pulsed Liquid Impact  9.3 Impact by Water Drops  9.4 Modeling Machining Thresholds  9.5 Comparative Results  9.6 Material Removal Rates  9.7 Design of Water-Based Tools  9.8 Analysis of Space Frame  9.9 Mode Shapes of Tetrahedral Structure  9.10 Conclusions  9.11 Problems  References10. Diamond Nanogrinding  10.1 Introduction  10.2 Piezoelectric Nanogrinding  10.3 Stress Analysis in Nanogrinding Grains  10.4 Fracture Dominated Wear Model  10.5 Nanogrinding  10.6 Porous Nanogrinding Tools  10.7 Laser Dressing of Tools  10.8 Future Directions  10.9 Problems  References11. Nanomachining  11.1 Introduction  11.2 Nanometric machining  11.3 Theoretical Basis of Nanomachining  11.4 Implementation  11.5 Conclusions  11.6 Problems  References12. Micro- and Nanomanufacturing  12.1 Introduction  12.2 Micromanufacturing  12.3 Nanomanufacturing  12.4 Commercialization Issues of Micro and Nanotechnologies  12.5 Future Developments  12.6 Problems  ReferencesSubject Index

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•   就是这样